REFRACTION COMPONENT OF A HOLOGRAM DATA STORAGE SYSTEM AND METHOD FOR FORMING THE SAME

摘要

PURPOSE: A refraction component of a hologram data storage system and a refraction component forming method are provided to improve the record density by being incidence on a storage medium dividing a reference beam into different angles of incidence. CONSTITUTION: The refraction component forming method comprises the steps of: forming a mask which has an exposure groove(210) on one plane of an annular substrate; making implantation damage different from each other along a circumference of a light projective plate(110) so that an exposure part of a mask-covered light projective plate(110) is rotated in a vacuum chamber(300) of an implantation apparatus and an ion is implanted to the exposure part thereof; removing the mask covering the light projective plate(110); forming a photoresister layer on an intermediate surface of the light projective plate(110); etching the light projective plate(110) to form an inclined refraction plane; and removing the photoresister layer.