| 摘要 |
The actuator is formed by fashioning a vibrating plate (20) to contain a chamber plate (10). Metal powder (40) is coated over the coupled plates, and the plates are placed in a furnace. The furnace is heated to a high degree, which forms an anti-oxidation metal film (80) over the top of the plate surfaces. The plates are then treated in an oxidation atmosphere, to form an anti-oxidation film (50). An oxide piezoelectric element (60) is then deposited on the upper surface of the plate, before an electrode (70) is laminated over the piezoelectric element. The metal coating mixture contains an active agent for activating the coating process, and an anti-sintering agent to stop the coating from flowing or sintering. |
