| 摘要 |
PURPOSE: A thin film actuated mirrors array in an optical projection system is provided to decreases a line defect in a pixel due to an occurrence of electrical shorts by further forming a common electrode line and connecting to the upper layer through a via contact. CONSTITUTION: The thin film actuated mirrors array comprising an active matrix (100) including a first metal layer (107), which a MOS transistor (105) is built-in and a drain pad (108) extending from a drain (104) of the transistor; a common electrode line (175) formed on the active matrix (100); an actuator (145) including i) a support layer (125) in which a side of the support layer becomes a first anchor (126) and a second anchors (127a and 127b) in which the drain pad (108) is formed on an under site out of the active matrix and facing to both sides thereof on a straight line, and the other side of the support layer formed vertically on the active matrix, ii) a lower layer (130) formed on the top of the support layer (125), iii) a deformable layer (135) formed on the lower layer (130), iv) an upper layer (140) formed on the deformable layer (130), and v) an upper electrode connections (160a and 160b) formed from the one side of the upper electrode (140) to the upper portion of the neighbor actuator across the anchors (127a and 127b); a via first contact (156) formed from the lower layer (135) to the drain pad (108) across the first anchor (126); a via second contact (180) formed from the upper electrode connections (160a and 160b) to the common electrode line (175a) across the second anchors (127a and 127b); and a mirror (200) formed onto the actuator (145). |
