INFRARED RAY ABSORPTION BOLOMETER FABRICATION METHOD OF A THREE-LAYER STRUCTURE

摘要

PURPOSE: An infrared ray absorption bolometer fabrication method is provided to have an improved absorption factor. CONSTITUTION: The infrared ray absorption bolometer fabrication method comprises the steps of: preparing a drive substrate level(210) having a substrate(212) and a pair of connection terminals(214), wherein a protection layer(216) is formed on the substrate of the drive substrate level; forming a first sacrifice layer(300) comprising a pair of void holes on the drive substrate level; forming a support level(220) by forming a pair of support posts(240) on the first sacrifice layer; forming a second sacrifice layer(310) comprising a pair of holes on the support posts and the first sacrifice layer; forming an absorption level(230) on the second sacrifice layer, wherein the absorption level comprises a bolometer surrounded by an absorption plate(290); and removing the second sacrifice layer and the first sacrifice layer.