METHOD FOR MANUFACTURING OPTIC BENCH USED FOR MODULE OF LASER DIODE AND PHOTO-DIODE

摘要

PURPOSE: A method for manufacturing an optic bench used for a module of a laser diode and a photo-diode is provided to effectively proceed a package process for packaging a module. CONSTITUTION: The method for manufacturing an optic bench used for a module of a laser diode and a photo-diode comprises the steps of: forming a photoresist pattern(16) to divide a photoresist coated by exposing and developing a photoresist of a silicon substrate(13) on which a SiN film and a photoresist is deposited sequentially into three quadrangles; deleting SiN film exposed on the photoresist pattern by a mask, and forming a SiN mask pattern(150 by deleting the photoresist pattern; forming a groove of V shape by etching a side wall of the exposed silicon with a slope of a predetermined angle; and deleting the SiN mask pattern, and forming metal patterns on an area in which the SiN mask pattern is deleted.