PIEZOELECTRIC ACTUATOR OR MOTOR, METHOD THEREFOR AND METHOD FOR FABRICATION THEREOF

摘要

PURPOSE: Disclosed is an actuator or motor comprising electro-mechanical material altering its shape under the influence of an electric field, whereby motion relative to a body is created by non-resonant repetition of small steps. CONSTITUTION: The actuator or motor comprises at least one monolithic module with electrodes integrated in said electro-mechanical material. The monolithic module has at least one passive part (1) and at least one active element (2), whereby at least two independent contact points at the active element/elements (2) are provided against the moving body. The contact points are positionable independently of each other in at least two independent directions relative to the passive part (1) of the monolithic module. The monolithic module is used by itself or in combination with other modules for creating the motion relative to the body. The invention also discloses a method for driving the modules. A method for fabrication of an actuator or motor of the above described type is also disclosed. That fabrication method comprises replication of geometrical shapes into a green body of said electro-mechanical material.