| 摘要 |
PURPOSE: A semiconductor wafer test contactor relates to a probe contactor electrically contacted to a contact target, is used for a probe card which enhances a frequency bandwidth, a density and a quality when testing a semiconductor wafer, a semiconductor chip, and PCB. etc. CONSTITUTION: A contactor(230) for testing a semiconductor wafer(300), a package LSI or PCB is formed on a flat surface of a substrate(220) by a photolithography. The contactor includes a substrate having an interconnection trace(232) being electrical conductive path thereon. The contactor is formed on the substrate by the photolithography. The contactor includes a base part vertically formed on the substrate, and a horizontal part formed on the base part, and a contact part vertically formed on the horizontal part. A spring force of the horizontal part of the contactor generates a contact force in case that the probe contactor is pressed on the semiconductor device. |
