发明名称 |
Process state detector, semiconductor sensor and display device for displaying a process state used therefor |
摘要 |
In a multiple function type differential pressure sensor including a semiconductor chip having a differential pressure detector for detecting a differential pressure, temperature detector for detecting a temperature, and static pressure detector for detecting a static pressure provided on a semiconductor substrate of a single chip, two or more pairs of differential pressure detectors means are incorporated, and a difference between outputs of the two or more pairs of differential pressure detectors is fetched out.
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申请公布号 |
US6016706(A) |
申请公布日期 |
2000.01.25 |
申请号 |
US19960769385 |
申请日期 |
1996.12.19 |
申请人 |
HITACHI, LTD. |
发明人 |
YAMAMOTO, YOSHIMI;TOBITA, TOMOYUKI;NAGASU, AKIRA |
分类号 |
G01L9/04;G01L9/00;G01L19/02;G01L19/04;(IPC1-7):G01L9/06 |
主分类号 |
G01L9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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