摘要 |
PROBLEM TO BE SOLVED: To suppress a flocculation between ultrafine particles and thereby improve the concentration of the ultrafine particles by laminating plural polysilmethylene films containing metallic ultrafine particles selected from gold, platinum, palladium, copper and silver, dispersed in the surface part of the film. SOLUTION: An ultrafine particle layer of a metal selected from gold, platinum, palladium, copper and silver is formed on a disilacyclobutane film, which is, in turn, heated at a temperature below the melt point of polysilylmethylene to be imparted by disilacyclobutane to form a polysilylmethylene film containing metallic ultrafine particles dispersed in the surface part of the film. In addition, a second disilacyclobutane film is formed on the polysilylmethylene film and an ultrafine particle layer of a metal selected from gold, platinum, palladium, copper and silver is formed. After that, the disilacyclobutane film is heated at a temperature below the melt point of the polysilylmethylene to form a second polysilylmethylene film containing the metallic ultrafine particles dispersed in the surface part of the film. |