| 摘要 |
PROBLEM TO BE SOLVED: To control the humidity at a low cost, and solve a problem caused by generation of the static electricity without any trouble on the maintenance and control of a device, etc., in an environment high in humidity by effecting the film peeling process in a space, and setting the inside of the space to be constantly in at least a specified humidity. SOLUTION: The film peeling process is effected in a partitioned space 5 (a box, etc.), and the inside of the space 5 is set to a condition of constantly at least 60% humidity, and free from dew condensation. A humidifying device is provided as a steam supplementing means 8 to supplement steam into the space 5, and the humidity condition in the space 5 is maintained by the stream supplement means 8. The humidifying device supplements steam be heating water or by applying the ultrasonic wave to waver. The air containing steam flow from an upper part to a lower part in the space through a filter 11. The condition free from humidity control or condensation can be easily obtained, and a problem caused by the static electricity can be effectively solved by adding an inonizer.
|
