METHOD FOR MANUFACTURING AN IMAGE SENSOR FOR PROTECTING A SURFACE OF PAD METAL

摘要

PURPOSE: A fabrication method of an image sensor is provided to protect a surface of a pad metal when a color filter formation. CONSTITUTION: The image sensor formation method comprises the steps of: forming a protection layer made of an oxide and a nitride layers(203,304) on a substrate having metal wire(201); forming a pad opening(205) to expose a portion of the metal wire(201) by selective etching the protection layers; forming a TEOS oxide(200) on the exposed pad opening(205) for protecting the exposed metal wire; performing a color filter array formation process; and removing the TEOS oxide(200).