| 摘要 |
PURPOSE: A lithographic projection apparatus is provided to diminish the harmful factor like spurious motion, mechanical vibration, shock. CONSTITUTION: In an apparatus including the radiation part supplying projection light, mask table with mask holder fixing mask, substrate table with holder fixing substrate, projection system forming image of mask radiation part on target area of substrate, first operating apparatus which moves the mask table in the predetermined standard direction parallel to table surface, second operating apparatus which moves the substrate table parallel to a standard direction in accordance with the operation of mask table, the characterized apparatus comprises the first measuring means for deciding the temporal position of the mask table to a fixed standard point, the second measuring means for deciding the temporal position of the substrate table to a fixed standard point, means for transportation which compare the difference of the two position and generate the signal of position error according to the result of comparison and adjusting the temporal position of mask table to compensation the difference.
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