发明名称 IMPROVED ELECTROPLATING METHOD AND APPARATUS
摘要 The present invention provides an improved method for electroplating metallic ions onto a conductive substrate. In one embodiment, the method comprises at least partially covering a selected surface of the conductive substrate with an electrode wrap that includes a pad having an abrasive surface. The metallic ions are electrically depositing onto the selected surface through the electrode wrap while the conductive substrate is moved (e.g., rotated) relative to the electrode wrap. A substantially constant frictional force is controllably applied from the abrasive surface onto the selected surface while the metallic ions are being deposited. In this manner, a substantially constant abrasive force is applied to the selected surface as the thickness of the deposited metallic coating increases to create a relatively smooth, uniform, thick deposition that is substantially free of defects.
申请公布号 CA2249970(A1) 申请公布日期 2000.01.24
申请号 CA19982249970 申请日期 1998.10.07
申请人 CAE VANGUARD INC. 发明人 ZHANG, MING (JASON)
分类号 C25D5/06;C25D5/22;(IPC1-7):C25D5/00;C25D3/12;C25D17/02 主分类号 C25D5/06
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