| 摘要 |
PURPOSE: A bulkhead fabrication method is provided to perfectly remove an un-patterned part and sufficiently develop a patterned part. CONSTITUTION: The bulkhead fabrication method comprises jetting a wafer or an alkali aqueous solution on an inorganic corpuscle content photosensitive composition exposed on a pattern after being exposited on a substrate above a thickness of 10 microns. An average grain diameter of the inorganic corpuscle is a glass of 0.1-10 microns or an alumina of 0.1-10 microns, and a bulkhead height of the inorganic corpuscle is 15-3000 microns. |
