摘要 |
PROBLEM TO BE SOLVED: To stabilize the illuminating light quantity, to obtain the reproducibility of transmissivity and to give optional transmissivity characteristic even in the case of using an inexpensive illuminating light source. SOLUTION: This device is provided with an illuminating light source 1 emitting illuminating light, a light adjusting means 10 adjusting the illuminating light quantity from the light source 1 by an optical system, a detection means 24 detecting the light quantity adjusted by the means 10, a storage means 6 storing the target value of the illuminating light quantity in accordance with the number of adjusting stages of the means 10 optionally set, and a control means 5 comparing an output signal value on the light quantity detected by the means 24 with the target value for the means 10 and controlling the means 10 based on the compared result so that the illuminating light quantity may come close to a target value.
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