| 摘要 |
PROBLEM TO BE SOLVED: To prevent debris from adhering to an X-ray optical system and generate X rays of high intensity stably by supplying an X-ray light path between a target and the X-ray optical system with a macromolecular film whose thickness is a specified one or less almost perpendicularly to the light path. SOLUTION: The X-ray source device that generates laser plasma soft X rays by irradiating a prescribed target with a laser beam is equipped with a shield member 5 in the light path 100 of X rays. In the shield member 5, for example, a through path 50 for X rays is formed inside and a macromolecular film supply cartridge 51 and a macromolecular film recovery cartridge 52 are placed on both sides. A frame 7 that holds a film mace of polypropylene whose thickness is 3μm or less, for example, 0.2μm, is supplied from the supply cartridge 51 to the through path 50 by a linear introducer 54. The film is used to shield an X-ray optical system from debris emitted from the target and suspended in the device. The frame 7 to which the debris adheres is replaced with a new one by the supply cartridge 51 and the recovery cartridge 52. |
