DRIVE UNIT FOR TARGET FOR X-RAY SOURCE DEVICE

摘要

PROBLEM TO BE SOLVED: To stably generate X rays continuously for a long time by removing a residue of a target adhering to the surface of a support member in a state where an X-ray source is kept under vacuum. SOLUTION: This device includes a target supply device 6 that moves a target 30 shaped like a tape in the direction of its length, a support member 7 placed on the back face of the target 30 in a position where X rays are condensed and a means 80 for removing a residue to the target on the front surface of the support member 7. By driving the removing means 80, the residue of the target adhering to the surface of the support member 7 can be removed while a vacuum is kept and laser light is radiated.