| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma generation device capable of increasing overload capacity and enhancing the degree of operation freedom. SOLUTION: This device is provided with waveguides 2, 22, 4 to inject microwave power delivered from a microwave generation source into a discharge container, a sealing mechanism 3 having a window member 16 that is inserted in an intermediate part the waveguides 2, 22, 4 and made of a dielectric to seal the discharge container, a protecting partition mechanism 21 to partition between the sealing mechanism 3 and the discharge container at an intermediate part of the waveguides 2, 22, 4 with a window member 26 made of a dielectric. |
