发明名称 ELECTRONIC COMPONENT AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide an electronic component that is made thinner and has strength improved with respect to external pressure such as atmospheric pressure. SOLUTION: This electronic component is provided with a sealed space 2c between a support substrate 1a and a lid substrate 1c, where the pressure is reduced to below atmospheric pressure. Sealed parts 8a, 9a, 11, 12 are housed in this sealed space 2c. At least one support body 13 is provided between the support substrate 1a and the lid substrate 1c in the sealed space 2c, and the two substrates support each other against the atmospheric pressure.
申请公布号 JP2000022170(A) 申请公布日期 2000.01.21
申请号 JP19980182527 申请日期 1998.06.29
申请人 MURATA MFG CO LTD 发明人 KAWAI HIROSHI;KOBAYASHI SHINJI;NEGORO YASUHIRO
分类号 G01L9/04;G01L9/00;H01L29/84 主分类号 G01L9/04
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