| 摘要 |
PROBLEM TO BE SOLVED: To simplify a process and to provide a high-density master disk with narrow pitch tracks below a diffraction threshold and micropitches by using a super-high resolution film which is removed together with a photosensitive member in a developing stage and is reversibly changed in transmittance according to light intensity. SOLUTION: A photoresist 2 and a water-soluble barrier layer 3 are laminated on a glass substrate 1 and the super-high resolution film 4, such as semiconductor particulate dispersion film, which is reversibly changed in transmittance with irradiation energy and can be removed together with the photosensitive member in the developing stage, is formed thereon. A transmittance change is induced by exposure with an Ar laser beam 5, by which desired narrow track pitches and micropit patterns are obtd. at the opening smaller than a light spot. The simultaneous removal of the super-high resolution film 4 is made possible in the subsequent developing stage and the need for providing the stage for removing the super-high resolution film is eliminated. A chalcogen- based phase transition material or ZnS, ZnO, etc., are usable as the material of the super-high resolution film.
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