| 摘要 |
PROBLEM TO BE SOLVED: To provide a photoelectric type encoder, having a superior high speed response performance and superior insulation resistance and heat resistance. SOLUTION: A scale 1 having an optical grating having specified pitches, light source 3 for irradiating light on the scale 1 and an array 2 of a plurality of photodetectors 22 for detecting a light transmitted through the scale 1, which are arranged facing with specified gap to the scale 1 relatively movably in the length direction of the scale 1, whereby the array of plurality of photodetectors 22 constitutes an optical grating, and the photodetector array 2 is constituted of a substrate 21 and a plurality of photodetecting diodes constituted of a diamond semiconductor film on the substrate 21.
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