摘要 |
<p>PROBLEM TO BE SOLVED: To enhance uniformity of a conductive thin film in the case using an ink jet liquid drop giving method in the conductive thin film of an element part in a large area electron source board having a plurality of surface conductive type electron emission elements and improve an ink jet form without largely changing a driving system of the conventional device. SOLUTION: This electron source board 1 is manufactured in such a way that a pair of facing element electrodes 2, 3 is formed on a substrate, conductive liquid drops 8 containing a conductive substance are given to between the element electrodes, a conductive thin film is formed by heating the conductive liquid drops 8, part of the conductive thin film is foaming-treated to form an electron emission part, and electron emission elements are two-dimensionally arranged. When the conductive liquid drops 8 are given, an ink jet device equipped with nozzles 9 two-dimensionally arranged in pieces of M×N is used, nozzles of pieces of (m)×(n) (m<=M, n<=N) are selected from the nozzles 9, and the conductive liquid drops 8 are given to portions of (m)×(n) at the same time.</p> |