PIEZOELECTRIC THIN-FILM ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric thin-film element which has such a structure as to improve its piezoelectric constant. SOLUTION: A piezoelectric thin-film element 10 includes a piezoelectric film 30 disposed between upper and lower electrodes 40 and 20. The piezoelectric film 30 is made of a plurality of components and has a structure wherein adjacent regions 30A and 30B in a direction perpendicular to its film thickness direction are different in their composition. With such a structure, when percentages of the components of the film 30 are adjusted, a dielectric constant and piezoelectric 'g' constant of the film 30 can be adjusted. Accordingly, a piezoelectric 'd31' constant can be improved over that of a piezoelectric film of a single component.