| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a thermal field emission type electron gun with small virtual light source, high brightness, and stable emission. SOLUTION: An emitter 10 is formed in such a way that a ring-shaped groove 11 is formed in an emitter having a facet surface of relatively wide area with a fine working device using focusing ion beams, for example, for shaving off the emitter, and a thermal electric field is applied to the tip of the emitter 10 in which the groove 11 is formed. By applying the thermal electric field, the emitter is self-restored, a peak chip 12 and a facet F0 which is a crystal face at the peak of the peak chip 12 are formed in the emitter 10.</p> |
