| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser oscillator which can be stably used while preventing lubricating oil for a blower motor from being mixed into a gas circulation circuit. SOLUTION: In the laser oscillator device, a low pressure gas for a gas laser oscillator 1 is sucked and compressed by a gas compressor 3 of a blower 21, sent to a heat exchanger 2, lowered in its gas temperature therein, and then returned to the laser oscillator 1 for use. A cone-shaped rotor within the gas compressor 3 is rotated by a motor within motor driving part 4 provided under the gas compressor with a sealing mechanism 23 provided thereto, the motor driving part 4 is evacuated by a vacuum pump 6 via both valves 14 and 8 in pipings 9 and 10, the solenoid valve 8 being opened and closed by a signal received from an inverter 5 for rotation control of the motor, so that a pressure within the motor driving part 4 is controlled to be lower than a pressure within the gas compressor 3. Thereby a lubricating oil for the motor can be prevented from invading into the gas compressor 3, thus avoiding the oil from being mixed into a circulation gas for the laser oscillator 1. |
