| 摘要 |
PROBLEM TO BE SOLVED: To make a circuit element for only inspecting bipolar devices for wiring delay time mountable on the same semiconductor substrate together with a bipolar device to be inspected, so that the management of a wiring process becomes easier and the productivity of the circuit element may be improved by reducing as much as possible the occupying area of the element by reducing the number of stages of inverters and enabling the element to measure with accuracy. SOLUTION: A circuit element for only inspecting a bipolar device formed on a semiconductor substrate for wiring delay time finds the delay time per unit wiring length from the delay time difference between first and second wiring routes 1 and 2 to be measured by connecting the input terminals of inverters 3a, which are connected in series in odd stages including one or three stages to a first bidirectional FET switch SW1, the output terminals of the inverters 3a to an output buffer 40 and a second bidirectional FET switch SW2, the other two terminals of the first FET switch SW1 to one end sections of the wiring routes 1 and 2, and the other two terminals of the second FET switch SW2 to the other end sections of the paths 1 and 2.
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