| 摘要 |
PROBLEM TO BE SOLVED: To realize normal, exposure for attaining complete synchronization of control for each column, and to improve the through put in a charged particle beam aligner equipped with plural columns. SOLUTION: This device is provided with a pattern data correction control part 641, provided for each column so that a correction arithmetic processing can be operated to exposure data according to the characteristics of the corresponding column. Then, an arithmetic processing time corresponding to the period of the exposure processing necessary for the corresponding column is calculated from data SD1, SCD2, WDM1, and WDS1 indicating an exposure time for each shot, setting waiting time, and exposure time correction value generated based on the processing, and the maximum value of each arithmetic processing time calculated by each pattern data correction control part is detected, and an arithmetic processing clock CK is generated based on data PCD of the arithmetic processing time of the detected maximum time and is supplied to correction arithmetic processing parts 72-74 of each pattern data correction control part.
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