| 摘要 |
PROBLEM TO BE SOLVED: To provide a rubbing device which can produce an alignment film having a specified surface aligning ability by suitably controlling a pressing amount of a rubbing roller. SOLUTION: A rubbing device 31 is equipped with rubbing rollers 32, 33, 34 to perform a rubbing treatment on an alignment film formed on a substrate, AC servomotors 35, 36, 37 to rotate and drive the rubbing rollers, torque meters 38, 39, 40 provided between the shafts of the rubbing rollers and the servomotors to directly connect both and a relative position controlling means. Thereby, based on the torque detected with the torque meters, the relative position of the rubbing rollers and the substrate is controlled. |
