发明名称 SEMICONDUCTOR MANUFACTURING APPARATUS AND MANUFACTURE OF SEMICONDUCTOR DEVICE USING THE MANUFACTURING APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To provide a manufacturing method, which can readily remove burrs formed on the surface of the metal plated layer of a lead frame, to which a metal ball is attached in the formation of the semiconductor device having a BGA structure, and the manufacturing apparatus using the method thereof. SOLUTION: A second gate 106a and a dummy cavity 107a are provided on the a protrusion 105a provided in a cavity 104a of a cavity block 101a. When resin sealing is made using this cavity block 101a, the dummy cavity which is readily removed is formed on the surface of a metal plated layer.</p>
申请公布号 JP2000021910(A) 申请公布日期 2000.01.21
申请号 JP19980181055 申请日期 1998.06.26
申请人 NEC KYUSHU LTD 发明人 SHINTANI TADAYUKI
分类号 H01L23/28;H01L21/56;(IPC1-7):H01L21/56 主分类号 H01L23/28
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