| 摘要 |
PROBLEM TO BE SOLVED: To generate X rays of high intensity in the wavelength known as a water window area by using as a target a carbon compound where a material containing carbon is thermally treated or a sulfur compound where a material containing carbon is treated by adding sulfur. SOLUTION: In the X ray generating device that generates X rays by irradiating a target with laser light and the like, the material of the target is a macromolecular film with a high ratio of carbon elements treated by adding sulfur under a prescribed condition. If the target material is irradiate with laser light, a larger mount of highly dense plasma of sulfur or a sulfur compound. The transition of energy from the plasma to carbon increases the intensity of X rays around 4.05 nm within a water window range, a wavelength of 2 to 5 nm. Even if a macromolecular material coated with carbon and thermally treated at a temp. of about 150 to 200 deg.C is used as the target material, the increase in the amount of generated plasma made mainly of carbon brings about a similar result.
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