发明名称 ALIGNER AND ITS OPERATION SUPPORTING METHOD
摘要 PROBLEM TO BE SOLVED: To eliminate wasteful operations and reduce wasteful time taken until the displaying of a manual. SOLUTION: A help message 36F at a proceeding stage of operation for a main unit 10 of an aligner is selected from a memory unit 36 and is put on a standby state, on the basis of data from process monitoring software 34. When an input of help message output command is entered from an input device 30, a selected help message 36B is immediately selected and generated from a display 30D through a help-message display software. As a result, since an adequate help message 36F is displayed whenever operation support is necessary, wasteful operations or losses in time until the displaying of a manual can be reduced, and an operator can attend to his intended work.
申请公布号 JP2000021740(A) 申请公布日期 2000.01.21
申请号 JP19980197979 申请日期 1998.06.29
申请人 NIKON CORP 发明人 NAKAMURA HAJIME
分类号 G03F7/20;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/20
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