| 摘要 |
PROBLEM TO BE SOLVED: To prevent degradation in quality or reliability of a product by preventing the sealing of a nichrome wire vapor, etc., in a package in a heater of a pressure reduced oven used for heating-drying the package body as for the prestep of airtight sealing a semiconductor element in the package. SOLUTION: In the heater of a pressure reduced oven, a pair of right and left heater blocks 50 are heated by a plurality of halogen heaters 72 while a self board 52 held between both heater blocks 50 is heated by the conductive heat from the heater blocks 50. In such an arrangement, it is recommended that the halogen heaters 72 are horizontally supported in a plurality of positions in a heater chamber 58 to be expanded in the long direction of the heaters 72. The halogen heaters 72 can be loaded on a pair of heater supporting members 80 fixed on an insertable reflecting board into the heater chamber 58 to be suspended.
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