| 摘要 |
PROBLEM TO BE SOLVED: To provide a lighting system brightness distribution measuring device wherein the lighting system brightness distribution on an exit pupil plane of a projection optical system is efficiently measured with precision. SOLUTION: The brightness distribution of lighting optical system 2-14b of a projection aligner comprising the lighting optical system 2-14b which guide the light flux emitted from a light source 1 to a mask pattern 21 and a projection optical system 22 which forms an image of the mask pattern on a photo-sensitive surface on a photo-sensitive substrate W is measured. Here, with condensing optical systems 24a, 24b, and 24c as well as an imaging element 25 provided, the front-side focal point of the condensing optical systems 24a, 24b, and 24c are allocated at the position of photo-sensitive surface on the photo-sensitive substrate W while the imaging element 25 is allocated at a rear-side focal point of the imaging optical elements 24a, 24b, and 24c.
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