发明名称 METHOD AND DEVICE FOR MANUFACTURING ELECTRONIC COMPONENTS
摘要 PROBLEM TO BE SOLVED: To improve a joint quality, wherein an IC chip is joined to an individual substrate, while eliminating the need for a process for dividing a substrate, using a pre-divided individual substrate, so that no stress acts on the joint part between a bump and a joint electrode, in a method and a device for manufacturing an electronic component. SOLUTION: A pallet 60 holding a plurality of individual substrates 60 is positioned on a bonding stage part 11, each substrate 60 is pushed upward by a protrusion 36 which protrudes above the upper surface of the bonding stage part 11 while being held by a pallet 61. While each substrate 60 is being clamped under pressure for fixing with a pressuring means 45 provided on the bonding stage part 11 capable of rising/falling, an IC chip 5 is sequentially supplied on each individual substrate 60 for ultrasonic wave joint, making certain that no individual substrate 60 moves at the ultrasonic wave joint for assured joint quality.
申请公布号 JP2000021932(A) 申请公布日期 2000.01.21
申请号 JP19980188994 申请日期 1998.07.03
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MINAMITANI SHOZO;AZUMA KAZUJI;TAKAHASHI KENJI;KANAYAMA SHINJI
分类号 H01L21/60;H01L21/607;(IPC1-7):H01L21/60 主分类号 H01L21/60
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