| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an insulation film, having a low dielectric const. and a layer insulation film composed of this insulation film. SOLUTION: A raw material chemical liq. of an SOG film, i.e., a layer insulation film is carried pneumatically in a chemical liq. piping 4 with a pneumatic carrier gas contg. one of rare gases, inert gases, hydrocarbon gases and air as the main component and is coated from a chemical liq. nozzle 5, having a top end of an inner diameter smaller than the piping diameter of the chemical liq. piping 4 on a substrate 6 rotating at a specified speed. During pneumatic carrying to the liq. chemical nozzle 5 top end which has a small inner diameter from the liq. chemical piping 4, the raw material chemical liq. is compressed adiabatically, the pneumatic carrier gas is dissolved in the chemical liq. Than when the raw material chemical liq. is discharged in an open air above the substrate 6 from the chemical liq. nozzle 5, the chemical liq. is expanded adiabatically to form bubbles of the dissolved gas in the chemical liq., resulting in the small holes in the SOG film to be made to reduce the dielectric const. of the film.
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