发明名称 REACTOR VESSEL HAVING IMPROVED CUP, ANODE AND CONDUCTOR ASSEMBLY
摘要 An improved anode, (114) cup (16) and conductor assembly (122) for a reactor vessel (100) includes an anode assembly (117) supported within a cup (16) which holds a supply of process fluid. The cup (16) is supported around its perimeter within the reactor vessel (100), and the diffusion plate (112) and the anode assembly (117) are installable from the top of the reactor vessel (100) using a tool (300). The anode assembly (117) has an anode shield (116) carrying an anode (114), the anode shield (116) having upwardly extending brackets (274) with radially extending members. A diffusion plate (112) is supported above the anode (114) by the anode brackets (274) using first bayonet connections. The anode shield (116) and the anode are (114) supported from below by a delivery tube (44) which serves to deliver process fluid to the cup (16). A second bayonet connection is provided between a top portion of the delivery tube (44) and the anode assembly (117) with interposing spacer. The fluid delivery tube (44) has a fixed height within the vessel.
申请公布号 WO0003067(A1) 申请公布日期 2000.01.20
申请号 WO1999US15430 申请日期 1999.07.09
申请人 SEMITOOL, INC. 发明人 WOODRUFF, DANIEL, J.;HANSON, KYLE, M.
分类号 C25D17/00;C25D5/08;C25D7/12;C25D17/06;(IPC1-7):C25B9/00;C25D17/10;C25D17/02 主分类号 C25D17/00
代理机构 代理人
主权项
地址