ELECTROPLATING REACTOR INCLUDING BACK-SIDE ELECTRICAL CONTACT APPARATUS

摘要

An apparatus for electroplating a workpiece wherein the apparatus includes a workpiece holding structure (260) having a workpiece support (120) with at least one surface being engaged to a front side of the workpiece and at least one electrical contact (154) in contact with at least one corresponding electrical contact on a back-side of the workpiece. The workpiece includes one or more electrically conductive paths between the electrical contact(s) (154) and a front-side of the workpiece to facilitate electroplating of the front-side surface. An actuator (126) is provided for driving the workpiece support (120) between a first position in which the workpiece electrical contact(s) and the workpiece holding structure contact(s) (154) are disengaged from one another, and a second position in which the workpiece electrical contact(s) (154) and the workpiece holding structure contact(s) are electrically engaged.