System and method for measuring layer thickness on substrates utilize the motion of the substrates relative to a measuring head during their transport along a given track

摘要

The system (2) determines the layer thickness variation on a substrate (4) by means of a measuring head (20, 24) during continuous transport of the substrate relative to the measuring head. An Independent claim is also included for a method which involves provision of a measuring system working on transmission or reflection principle, displacement of the substrate through the measuring system along a measurement track, and evaluation of the signals produced by the measuring head to obtain information about the layer thickness variation on the substrate.