| 摘要 |
PROBLEM TO BE SOLVED: To realize automatic preparation of a sample and greatly reduce a preparation time by controlling the film thickness of a transmission type electron microscope(TEM) observation sample. SOLUTION: Argon ion 2 is cast on a sample 3 by an argon ion gun 1 and ion milling is carried out. Laser beam is irradiated on the sample 3 by a laser light source 4. Reflected light image of laser beam is picked up by an image- pickup device 5 and is displayed in a display 6. A part of a TEM observation region on the sample 3 of image data is transferred to a final point deciding device 7. The final point deciding device 7 compares film thickness change of image data of an input observation region with a reflected light pattern, which is stored in advance and when it judges that a film thickness of an observation region of the sample 3 reaches a desired value, it emits a stop signal to the argon ion gun 1.
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