| 摘要 |
PROBLEM TO BE SOLVED: To set and correct offset highly accurately, without impairing productivity. SOLUTION: A position detecting camera 7 is moved to the upper part of a reference mark 10a. The positional relation of the reference mark 10a to an optical axis 7a of the position detecting camera 7 is measured with the position detecting camera 7. A tool 4 is moved on the reference mark 10a based on the offset amount stored beforehand, and the positional relation of the reference mark 10a to the tool 4 is measured by an offset correcting camera 12. Based on the results of these measurements, the offset amount stored beforehand is corrected, and accurate offset amount is obtained. |
