| 摘要 |
An inventive brush and scrubbing device is provided for simultaneously scrubbing both planar and profiled (e.g., edge) surfaces of a thin disk such as a semiconductor wafer (W). The inventive brush has a contact surface (25) having two portions, a planar portion (27) for contacting a planar surface of a wafer, and a profiled portion (31) for contacting an edge surface of a wafer. The profile of the profiled portion (31) preferably follows the edge profile of a wafer to be cleaned by the brush. The profiled portion may have a higher modulus of elasticity than does the planar portion. Preferably the brushes are roller type PVA brushes having a plurality of nodules (37, 39) formed thereon.
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