| 摘要 |
<p>A substrate handling robot (20) includes an arm drive mechanism (34). A first arm (22) is connected to the arm drive mechanism. A multiple substrate batch loader (24) is connected to the first arm. A second arm (26) is also connected to the arm drive mechanism. A single plane end effector (28) is connected to the second arm. The multiple substrate batch loader produces a vacuum signal indicative of how many substrates are held thereby. A vacuum signal interpreter alters the movement of the first arm in response to the substrate load number. An object sensor (58) is connected to the second arm. The object sensor assesses the number of substrates in a cassette adjacent to the multiple substrate batch loader. A substrate loading sequence controller controls the arms in response to the number of substrates in the cassette to facilitate complete loading of the multiple substrate batch loader.</p> |
