| 摘要 |
<p>A spectral ellipsometer that enables complete simultaneous measurement of ellipsometric parameters of a surface (18) with thin films and coatings for the full wavelength range of interest by using an imaging spectrograph (24) together with a novel optical arrangement that disperses the polarization information of a time-invariant train of optical signals in a linear spatial array of points along or parallel to an input aperture or slit of the imaging spectrograph (24) and disperses the polarization information in wavelength perpendicular to the aperture or slit to provide a two-dimentional spectrograph image that is collected and stored by an imaging array with one axis relating to wavelength and the other axis relating to the light polarization. Multiple simultaneous measurements of the spectral ellipsometric parameters γ (psi) and Δ (delta) are taken at all wavelengths without the need of any time-varying or mechanically-moving optical elements.</p> |
