Positioning device and lithographic projection apparatus comprising such a device

摘要

A positioning device comprising a first part and a second part which is displaceable relative to the first part by means of a system of Lorentz-force motors, whereby: relative to the first part, the second part is supported in a Z-direction by means of at least one gas cylinder, said gas cylinder comprising: a housing having a pressure chamber, which housing is coupled to the first part; and a piston which is coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction. <IMAGE>