发明名称 |
Method for annealing single crystal fluoride and method for manufacturing the same |
摘要 |
An annealing method for a single crystal of fluoride is provided. The method includes the steps of removing at least one of attached objects and absorbed objects from the surface of the single crystal of fluoride to clean the surface, thereafter annealing the single crystal of fluoride, including heating the single crystal of fluoride and gradually cooling the heated single crystal of fluoride, and removing a deteriorated layer which is formed on the surface of the single crystal of fluoride during the annealing step. <IMAGE> |
申请公布号 |
EP0972863(A1) |
申请公布日期 |
2000.01.19 |
申请号 |
EP19980115535 |
申请日期 |
1998.08.18 |
申请人 |
NIKON CORPORATION |
发明人 |
MIZUGAKI, TSUTOMU;TAKANO, SHUUICHI |
分类号 |
G02B1/02;C30B29/12;C30B33/00;C30B33/02;H01S5/00 |
主分类号 |
G02B1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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