发明名称 |
Apparatus for handling wafer like objects |
摘要 |
The arrangement has at least one transport device for transporting the objects in a manipulation plane between a preparation and acceptance site to a processing station arranged, in common with a further processing station, coaxially wrt. a centre forming the rotation axis of a central axle of a changeover device. The central axle of the changeover device (11)is enclosed by a fixed toothed rod (56) which is engaged in at least one desired position by the gripping elements (57,58) of a parallel gripping device (59) for reproducible positioning of the changing arms (16-18) of the changeover device. The gripping elements are in the form of toothed rod sections (54,55). |
申请公布号 |
EP0782175(A3) |
申请公布日期 |
2000.01.19 |
申请号 |
EP19960107217 |
申请日期 |
1996.05.07 |
申请人 |
JENOPTIK AKTIENGESELLSCHAFT |
发明人 |
SCHULTZ, KLAUS;BECKERT, HARALD;LAHNE, BERNDT;HEINZE, MANFRED |
分类号 |
B65G1/00;H01L21/00;H01L21/677 |
主分类号 |
B65G1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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