p-TYPE SEMICONDUCTOR, METHOD FOR MANUFACTURING THE SAME, SEMICONDUCTOR DEVICE, PHOTOVOLTAIC ELEMENT, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

A p-type semiconductor composed basically of an Ib-IIIb-Vib2 group compound semiconductor (especially CuInS2) which is improved in carrier concentration and has advantages in manufacture and performance. In order to obtain the p-type semiconductor mentioned above, p-type CuInS2 is formed by adding both P (p-type impurity) and Sn (n-type impurity) to CuInS2 . The carrier concentration of the p-type semiconductor is 5 x 10<17> cm<-3> which is larger than the value (5 x 10<16> cm<-3> ) obtained when P and In are added or anotherr value (3x 10<15> cm<-3> ) obtained when only P is added. A thin film solar cell characterized by a glass substrate (2), an Mo electrode (1), a p-type semiconductor layer (3), an n-type semiconductor layer composed of a CdS layer (4), and an ITO electrode (5) is manufactured by using the CuInS2 layer containing P and Sn as the p-type semiconductor (3). It is confirmed that the conversion efficiency of the solar battery is as high as 12%.