| 摘要 |
PROBLEM TO BE SOLVED: To provide a deposition apparatus capable of sufficiently cooling a sheet by bringing the thin sheet into tight contact with a cooling and supporting section. SOLUTION: This deposition apparatus has a temp. management mechanism having a cooling roll 141 as the cooling and supporting section which is arranged on a film source 20 and is maintained within a prescribed temp. range and a pair of tension rolls 42a and 42b as pressing mechanisms for pressing an org. film 500 toward the cooling roll 141 side in such a manner that the org. film 500 comes into tight contact with the surface of the cooling roll 141. The cooling roll 141 has a cushion layer 141b which consists of a silicon resin, has flexibility and has a surface shape projecting to the film source 20 side.
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