PRODUCTION OF GLASS SUBSTRATE FOR FLAT PANEL DISPLAY

摘要

PROBLEM TO BE SOLVED: To obtain a glass substrate causing little deformation of the glass after division even in the case of a large-sized glass plate and giving a display free from the problem of the generation of displaying defect by annealing a glass substrate using a heat-resistant setter having longitudinal and lateral dimensions larger than those of the glass substrate by specific lengths and decreasing the residual stress of the substrate in the plane direction to a specific level or below. SOLUTION: A glass substrate is annealed by using a setter larger than the substrate by >=50 mm in longitudinal and lateral directions and the residual stress of the substrate is decreased to <=5 kg/cm2. The glass substrate has a longitudinal dimension of >=400 mm and a lateral dimension of >=500 mm. A glass substrate for low-temperature poly-Si TFT is used as the glass substrate. Since the heat-resistant setter having excellent flatness is larger than the glass substrate by >=50 mm in longitudinal and lateral directions, the glass substrate can be uniformly heated. In this case, the center of the glass substrate is positioned nearly on the center of the heat-resistant setter. The material of the setter is a low expansion crystallized glass or a ceramic.