| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to continuously execute an in-vacuum treatment and plating treatment. SOLUTION: A wet process plating apparatus 30 is connected via a second vacuum chamber 80 to a first vacuum chamber 40 contg. a transfer mechanism 70. This second vacuum chamber 80 is provided with heating means 82, 84, 85. Heating and drying are executed in addition to vacuum drying. A series of deposition treatments from the respective vacuum apparatus 52, 53 to the wet process plating apparatus 30 are continuously, rapidly and exactly carried out in a sheet-fed treatment manner. |
